EU-PWI TF meeting, Caderache, 17-19 October 2005 N 2 seeding – impact of N ions on a-C:H N 2 + beam irradiation of a-C:H films in MAJESTIX Chemical sputtering dominates a-C:H erosion by N 2 + at low energies Erosion yields remarkably high: ~1 above ~50eV W Jacob et al
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