Assessing Risk – PFC Calculations 2006 IPCC Guidance for National Greenhouse Gas Inventories –Volume 6 Electronic Industry Emissions (formerly PFC, HFC, SF6 Emissions from Semiconductor Manufacturing) –Typically use Tier 2a, 2b or 3 methods – require site specific gas consumption and emissions control efficiencies –Results in emissions for CF4, C2F6, CHF3, C3F8, C4F6, C4F8, C4F8O, C5F8, C6F14, NF3, SF6 and by-products from F2 and COF2
{}