Historical Transition of ITRS Low-k Roadmap
{"Image DocumentName": "Historical Transition of ITRS Low-k Roadmap", "Image ImageDescription": "Since 2003, based on wiring capacitance calculation of three kinds of dielectric structures and validated against publications. ITRS2003. ITRS2005. ITRS Effective Dielectric Constant; keff. ITRS2001. Before 2001, unreasonable RM without logical basis. ITRS1999. Year of 1st Shipment decreased max bulk k by no significant change on keff in no changes Summer Conference.", "Image XResolution": "37", "Image YResolution": "37", "Image ResolutionUnit": "Pixels/Centimeter", "Image Software": "SlidePlayer", "Image YCbCrPositioning": "Centered"}