Melih Papila, papila@mae.ufl.edu 8 Design Variables I: Diaphragm/Structural z p 0 r = a h/2 Sheplak and Dugundji, 1998 a : radius of the diaphragm h : thickness of the diaphragm Structural responses of the diaphragm directly determine performance of the MEMS microphone measured by its sensitivity, bandwidth and linearity
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