Chris A. Mack, Fundamental Principles of Optical Lithography, (c) 2007
{"Image DocumentName": "Chris A. Mack, Fundamental Principles of Optical Lithography, (c) 2007", "Image ImageDescription": "(b) Figure 8.12 Different types of rotation errors as exhibited on the wafer: a) reticle rotation, and b) wafer rotation.", "Image XResolution": "37", "Image YResolution": "37", "Image ResolutionUnit": "Pixels/Centimeter", "Image Software": "SlidePlayer", "Image YCbCrPositioning": "Centered"}