ITRS 2008 3 AGENDA 2008 Changes Lithography Metrology FEP Metrology Interconnect Metrology ERM Metrology Key Messages 2008 Conclusions
{"Image DocumentName": "Metrology Roadmap 2008 Europe Thomas Hingst (Qimonda)", "Image ImageDescription": "Bart Rijpers (ASML) Japan Eiichi Kawamura (Fujitsu) Masahiko Ikeno (Hitachi High-Technologies) Yuichiro Yamazaki (Toshiba) Korea Chul Hong Kim (Hynix) Soobok Chin (Samsung) Eun Sang Cho (Dongbu HiTek) Taiwan. North America Alain Diebold (CNSE \u2013 Univ. Albany) Meredith Beebe (Technos) Ben Bunday (ISMI) Dan Herr (SRC) Mike Garner (Intel) Steve Knight (NIST) Jack Martinez (NIST) Dave Seiler (NIST) Victor Vartanian (ISMI)", "Image XResolution": "37", "Image YResolution": "37", "Image ResolutionUnit": "Pixels/Centimeter", "Image Software": "SlidePlayer", "Image YCbCrPositioning": "Centered"}