Grey=Si, Blue=Silicon Dioxide, Red=Photoresist, Purple= Phosphorus Doped Glass, Lilac= Silicon with Diffused Phosphorus, Silver=Aluminum Aluminum Coating Cross-section View of Wafer Step 8: Aluminum Deposition Overhead View of Wafer Sputtering Machine The wafer was attached to a larger carrier wafer and placed in the sputtering machine to be coated with aluminum.
{}