Factors affecting ALD surface reactions Growth rate in ALD is typically 1 Å /cycle or less.
{"Image DocumentName": "Factors affecting ALD surface reactions", "Image ImageDescription": "Growth rate in ALD is typically. 1\u212b/cycle or less. Cycle time varies. Higher growth rates indicate. in most cases the CVD growth. ALD surface reactions can be affected by. Reactivity of the precursor. Reaction mode (ligand exchange, dissociation, agglomeration) Reactivity of the ligand removal agent at the selected temperature. Number of the reactive sites. Reaction mode (monofunctional, bifunctional) Size of the precursor, i.e. steric hindrance.", "Image XResolution": "37", "Image YResolution": "37", "Image ResolutionUnit": "Pixels/Centimeter", "Image Software": "SlidePlayer", "Image YCbCrPositioning": "Centered"}